Packaged MEMS Micromirrors for Cyrogenic Environment
2008
Details
Title
Packaged MEMS Micromirrors for Cyrogenic Environment
Author(s)
Waldis, S. ; Zamkostian, F. ; Lanzoni, P. ; Noell, W. ; de Rooij, N. F.
Published in
MEMS 2008
Pages
758-761
Date
2008
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12