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conference paper
Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy
2007
MOEMS and Miniaturized Systems VI
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Name
waldis_pw07_6466-2.pdf
Access type
openaccess
Size
8.56 MB
Format
Adobe PDF
Checksum (MD5)
91f3a469b697070c8cb40b269095e5ac