Infoscience

Thesis

Surface Micromachined Electrostatic Actuators.

    Note:

    Jury: R. Dändliker (IMT-UniNE), X.Ph Renaud (EPFL), P. Vettiger (IBM ZH).

    Reference

    • SAMLAB-THESIS-1994-004

    Record created on 2009-05-12, modified on 2016-08-08

Fulltext

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