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doctoral thesis
Surface Micromachined Electrostatic Actuators.
JAECKLIN, Victor
1994
Type
doctoral thesis
Authors
JAECKLIN, Victor
Advisors
Publication date
1994
Publisher
Note
Jury: R. Dändliker (IMT-UniNE), X.Ph Renaud (EPFL), P. Vettiger (IBM ZH).
EPFL units
Available on Infoscience
May 12, 2009
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