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conference paper
Dry Etching Techniques for Silicon Micromachining
1990
MME'90 - Micromechanics Europe
Type
conference paper
Authors
Publication date
1990
Published in
MME'90 - Micromechanics Europe
Start page
253
End page
260
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record