Since local thermal probing has become a major tool for studying transport phenomena at micro- and nanoscale levels, the fundamental aspect of the interaction between the tip of the probe and the sample has remained the key point on which any quantitative measurement relies. In this paper we present results on thermal resistances involved in the contact mechanism of a microthermocouple cantilever probe that is used to scan the surface of a microhotplate at different levels of temperature. We point out the potential of such an active microsystem as an efficient calibration tool for near-field thermal probes. Copyright © 2008 by ASME.