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conference paper
Contribution of scanning probe temperature measurements to the thermal analysis of micro-hotplates
2004
10th International Workshop on Thermal Investigation of ICS and Systems
Type
conference paper
Authors
Publication date
2004
Published in
10th International Workshop on Thermal Investigation of ICS and Systems
Start page
23
End page
28
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record