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doctoral thesis
Photopatterning at thick photoresist layers for MEMS applications.
ROTH, Sylvain
2000
Type
doctoral thesis
Authors
ROTH, Sylvain
Advisors
Publication date
2000
Publisher
Note
Jury: M. Koudelka-Hep (IMT–Uni-NE), J. Bergqvist (CSEM).
EPFL units
Available on Infoscience
May 12, 2009
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