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conference paper
Miniaturized detectors fabricated using Si and EPON SU-8
1999
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators
Type
conference paper
Authors
Strike, D. J.
•
Michel, Ph.
•
L'Hostis, E.
•
Fiaccabrino, G. C.
•
•
Koudelka-Hep, M.
Publication date
1999
Published in
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators
Start page
130
End page
133
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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