Miniaturized detectors fabricated using Si and EPON SU-8
1999
Details
Title
Miniaturized detectors fabricated using Si and EPON SU-8
Author(s)
Strike, D. J. ; Michel, Ph. ; L'Hostis, E. ; Fiaccabrino, G. C. ; de Rooij, N. F. ; Koudelka-Hep, M.
Published in
Transducers'99 10th Internat. Conf. on Solid-State Sensors and Actuators
Pages
130-133
Date
1999
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12