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conference paper
Design for Reliability of Drift-Dree MEMS Micromirrors
Shea, H. R.
2004
Optical MEMS 2004
Type
conference paper
Authors
Shea, H. R.
Publication date
2004
Published in
Optical MEMS 2004
Volume
1
Start page
168
End page
169
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record