Miniaturised flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and SU-8 technologies


Published in:
10th Int. Meeting on Chemical Sensors
Year:
2004
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)