Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
2006
Details
Title
Characteristics of Buckled Bridges and Lifted Micromirror Using Film Stress
Author(s)
Sasaki, M. ; Hane, K. ; Briand, D. ; Noell, W. ; de Rooij, N. F.
Published in
IEEE/LEOS Optical MEMS 2006
Pages
82-83
Date
2006
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12