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conference paper
High aspect ratio UV photolithography for electroplated structures
1998
Micromechanics Europe '98
Type
conference paper
Authors
Publication date
1998
Published in
Micromechanics Europe '98
Start page
55
End page
58
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record