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NEMS for MEMS
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conference paper
NEMS for MEMS
de Rooij, N. F.
2006
ETH Zentrum
Details
Metrics
Type
conference paper
Authors
de Rooij, N. F.
Publication date
2006
Published in
ETH Zentrum
Peer reviewed
NON-REVIEWED
EPFL units
SAMLAB
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39770