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conference paper
MEMS Opportunities & Challenges for Applied Research
2004
IEEE Nanoelectronic and Photonic Systems Workshop Tarragona
Type
conference paper
Authors
Publication date
2004
Published in
IEEE Nanoelectronic and Photonic Systems Workshop Tarragona
Start page
13
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record