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conference paper
Neue Trends in der Mikrosystemtechnik
1999
Fachtagung: Werkstoffe der Mikrosystemtechnik
Type
conference paper
Authors
Publication date
1999
Published in
Fachtagung: Werkstoffe der Mikrosystemtechnik
Start page
1.1
End page
1.7
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record