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conference paper
Microsystems technology in Switzerland
1999
5th Internat. Micromachine Symposium
Type
conference paper
Authors
Publication date
1999
Published in
5th Internat. Micromachine Symposium
Start page
77
End page
81
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record