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conference paper
IC-Compatible Fabrication Technologies for Microfabricated Sensors and Actuators
1990
3rd International Forum on ASIC and Transducer Technology
Type
conference paper
Authors
Publication date
1990
Published in
3rd International Forum on ASIC and Transducer Technology
Start page
39
End page
47
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record