Details
Title
Wafer Level Packaging of Micro-Machined Gas Sensors
Author(s)
Raible, S. ; Kappler, J. ; Briand, D.
Published in
IEEE Sensors 2004
Volume
2
Pages
746-748
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12