Wafer Level Packaging of Micromachined Gas Sensors
2006
Details
Title
Wafer Level Packaging of Micromachined Gas Sensors
Author(s)
Raible, S. ; Briand, D. ; Kappler, J. ; de Rooij, N. F.
Published in
IEEE Sensors
Volume
6
Issue
5
Pages
1232-1235
Date
2006
Note
384
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12