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conference paper
Porous Silicon Sacrificial Layer Technique for the Fabrication of Free Standing Membrane Resonators and Cantilever Arrays
1997
Eurosensors XI 11th European Conf. On Solid-State Transducers
Type
conference paper
Authors
Publication date
1997
Published in
Eurosensors XI 11th European Conf. On Solid-State Transducers
Volume
1
Start page
285
End page
288
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record