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conference paper
Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters
2003
Eurosensors XVII
Type
conference paper
Authors
Publication date
2003
Published in
Eurosensors XVII
Start page
408
End page
409
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record