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conference paper
Replication of Optical MEMS structures in Sol-Gel materials
2003
2003 Micro and Nano Engineering
Type
conference paper
Authors
Publication date
2003
Published in
2003 Micro and Nano Engineering
Start page
482
End page
483
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record