conference paper
Replication of Optical MEMS structures in Sol-Gel materials
2003
2003 Micro and Nano Engineering
Type
conference paper
Author(s)
Date Issued
2003
Published in
2003 Micro and Nano Engineering
Start page
482
End page
483
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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