Replication of Optical MEMS structures in Sol-Gel materials
2003
Details
Title
Replication of Optical MEMS structures in Sol-Gel materials
Author(s)
Obi, S. ; Gale, M. T. ; Kuoni, A. ; Noell, W. ; de Rooij, N. F.
Published in
2003 Micro and Nano Engineering
Pages
482-483
Date
2003
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12