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  4. Replication of Optical MEMS structures in Sol-Gel materials
 
conference paper

Replication of Optical MEMS structures in Sol-Gel materials

Obi, S.
•
Gale, M. T.
•
Kuoni, A.
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2003
2003 Micro and Nano Engineering
  • Details
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Type
conference paper
Author(s)
Obi, S.
Gale, M. T.
Kuoni, A.
Noell, W.  
de Rooij, N. F.  
Date Issued

2003

Published in
2003 Micro and Nano Engineering
Start page

482

End page

483

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39648
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