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Replication of Optical MEMS structures in Sol-Gel materials

Obi, S. ; Gale, M. T. ; Kuoni, A. ; Noell, W.[...]

Published in:
2003 Micro and Nano Engineering, 482-483
Year:
2003
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-09-13


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