Infoscience

Conference paper

Replication of Optical MEMS structures in Sol-Gel materials

Obi, S.; Gale, M. T.; Kuoni, A.; Noell, W.; de Rooij, N. F.
  • Published in: 2003 Micro and Nano Engineering, p. 482-483
  • Publication date: 2003

    Reference

    • SAMLAB-CONF-2003-031

    Record created on 2009-05-12, modified on 2016-08-08

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