Type
conference paper
Authors
•
Clerc, P.-A.
•
Jeanneret, S.
•
•
Niedermann, P.
•
Perret, A.
•
Publication date
2004
Published in
The 17th IEEE International Conference on micro Electro Mechanical SystemsMEMS 2004
Start page
39904
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record