Engineering of thin film crystallinity for wear resistant coatings using a combination of PECVD and PVD plasma technology
2007
Details
Title
Engineering of thin film crystallinity for wear resistant coatings using a combination of PECVD and PVD plasma technology
Author(s)
Neels, A. ; Dommann, A. ; Ibzazene, A. ; Suter, M. ; Döbeli, M. ; Ante, M. ; Ramm, J.
Published in
CTI Day
Date
2007
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12