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Engineering of thin film crystallinity for wear resistant coatings using a combination of PECVD and PVD plasma technology

Neels, A. ; Dommann, A. ; Ibzazene, A. ; Suter, M.[...]

Published in:
CTI Day
Year:
2007
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-09-13


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