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conference paper
Micro-opto-mechanical 2x2 switch for single mode fibers based on plasma-etched silicon mirror and electrostatic actuation
1998
IEEE/LEOS Internat. Conf. on Optical MEMS and their Applications
Type
conference paper
Authors
Publication date
1998
Published in
IEEE/LEOS Internat. Conf. on Optical MEMS and their Applications
Start page
233
End page
237
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record