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research article
Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications
Type
research article
Authors
Marxer, C.
•
Thio, Ch.
•
Grétillat, M.-A.
•
•
Anthamatten, O.
•
Bättig, R.
•
Valk, B.
•
Vogel, P.
Publication date
1997
Published in
Volume
6
Issue
3
Start page
277
End page
285
Note
169
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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