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conference paper
Vertical Mirrors Fabricated by Reactive Ion Etching for Fiber Optical Switching Applications
1997
IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems - MEMS '97
Type
conference paper
Authors
Marxer, C.
•
Thio, C.
•
Grétillat, M.-A.
•
Anthamatten, O.
•
Baettig, R.
•
Valk, B.
•
Vogel, P.
•
Publication date
1997
Published in
IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems - MEMS '97
Start page
49
End page
56
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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