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conference paper
Reliability Considerations for Electrostatic Polysilicon Actuators Using as an Example the REMO-Component
1996
Eurosensors X - The 10th European Conference on Solid-State Transducers
Type
conference paper
Authors
Marxer, C.
•
Grétillat, M.-A.
•
•
Baettig, R.
•
Anthamatten, O.
•
Valk, B.
•
Vogel, P.
Publication date
1996
Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Start page
1117
End page
1120
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record