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research article
Reliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component
Type
research article
Authors
Marxer, C.
•
Grétillat, M.-A.
•
•
Anthamatten, O.
•
Baettig, R.
•
Valk, B.
•
Vogel, P.
Publication date
1997
Published in
Volume
61
Issue
3
Start page
449
End page
454
Note
170
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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