research article
Reliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component
Type
research article
Author(s)
Date Issued
1997
Published in
Volume
61
Issue
3
Start page
449
End page
454
Note
170
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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