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conference paper
Breakdown Mechanisms of Electrostatic Polysilicon Actuators Using as an Example the REMO Component
1996
IEEE/LEOS 1996 Summer Topical Meeting Optical MEMS and their applications
Type
conference paper
Authors
Publication date
1996
Published in
IEEE/LEOS 1996 Summer Topical Meeting Optical MEMS and their applications
Start page
15
End page
16
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record