Loading...
conference paper
Flexural-Plate-Wave Actuators Based on PZT Thin Film
1997
MEMS'97 IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems
Type
conference paper
Authors
Luginbuhl, Ph.
•
Collins, S. D.
•
Racine, G.-A.
•
Grétillat, M.-A.
•
•
Brooks, K. G.
•
Setter, N.
Publication date
1997
Published in
MEMS'97 IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems
Start page
327
End page
332
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record