conference paper
Deep Dry Etching of Silicon - A Novel Micromachining Tool
1992
Sensors and Materials
Cite this item
Linder, C., Tschan, T., & de Rooij, N. F. (1992). Deep Dry Etching of Silicon - A Novel Micromachining Tool. Sensors and Materials, 311–324. https://infoscience.epfl.ch/handle/20.500.14299/39550
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Type
conference paper
Author(s)
Date Issued
1992
Published in
Sensors and Materials
Start page
311
End page
324
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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