Deep Dry Etching Techniques as a New IC Compatible Tool for Silicon Micromachining
1991
Details
Title
Deep Dry Etching Techniques as a New IC Compatible Tool for Silicon Micromachining
Author(s)
Linder, C. ; Tschan, T. ; de Rooij, N. F.
Published in
Transducers'91 the 6th Internat. Conf. Solid-State Sensors and Actuators
Pages
524-527
Date
1991
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12