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conference paper
Deep Dry Etching Techniques as a New IC Compatible Tool for Silicon Micromachining
1991
Transducers'91 the 6th Internat. Conf. Solid-State Sensors and Actuators
Type
conference paper
Authors
Publication date
1991
Published in
Transducers'91 the 6th Internat. Conf. Solid-State Sensors and Actuators
Start page
524
End page
527
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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