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conference paper
Fertigungsverfahren für die Mikrosystemtechnik [Manufacturing Technologies for Microsystems]
1993
tm - Technisches Messen
Type
conference paper
Authors
Publication date
1993
Published in
tm - Technisches Messen
Volume
60 N°9
Start page
319
End page
328
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record