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conference paper
Investigations on Free-Standing Polysilicon Beams in View of their Application as Resonators
1989
Transducers'89 the 5th International Conference Solid-State Sensors and Actuators
Type
conference paper
Authors
Publication date
1989
Published in
Transducers'89 the 5th International Conference Solid-State Sensors and Actuators
Start page
289
End page
290
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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