Fabrication of Free-Standing Polysilicon Structures in View of their Application as Resonators
1989
Details
Title
Fabrication of Free-Standing Polysilicon Structures in View of their Application as Resonators
Author(s)
Linder, C. ; de Rooij, N. F.
Published in
AMA/SVS Seminar Mikromechanik
Pages
225-236
Date
1989
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12