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conference paper
Surface Micromachining
1992
MME'92 Micromechanics Europe Workshop
Type
conference paper
Authors
Publication date
1992
Published in
MME'92 Micromechanics Europe Workshop
Start page
43
End page
55
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record