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conference paper
Fabrication of electrically insulated microchannels in silicon (poster)
2000
Eurosensors XIV 14th European Conference on Solid-State Transducers
Type
conference paper
Authors
Publication date
2000
Published in
Eurosensors XIV 14th European Conference on Solid-State Transducers
Start page
463
End page
466
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record