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conference paper
A Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor
2002
Micromechanics Europe Workshop
Type
conference paper
Authors
Publication date
2002
Published in
Micromechanics Europe Workshop
Start page
267
End page
270
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record