A Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor


Published in:
Micromechanics Europe Workshop, 267-270
Year:
2002
Laboratories:




 Record created 2009-05-12, last modified 2018-01-28


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)