Optical Microshutters and Torsional Micromirrors for Light Modulator Arrays
1993
Details
Title
Optical Microshutters and Torsional Micromirrors for Light Modulator Arrays
Author(s)
Jaecklin, V. P. ; Linder, C. ; de Rooij, N. F. ; Moret, J. M. ; Vuilleumier, R.
Published in
IEEE Micro Electro Mechanical Systems Workshop
Pages
124-127
Date
1993
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12