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conference paper
Micromechanical Comb Actuators with Low Driving Voltage
1992
Technical Digest VDI/VDE Actuator'92
Type
conference paper
Authors
Publication date
1992
Published in
Technical Digest VDI/VDE Actuator'92
Start page
40
End page
45
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record