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conference paper
Tip Integration on Arrays of Silicon Micro Cantilevers with Self Exciting Piezoelectric Sensor for Parallel AFM Applications
1997
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Type
conference paper
Authors
Publication date
1997
Published in
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Volume
1
Start page
451
End page
453
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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