Tip Integration on Arrays of Silicon Micro Cantilevers with Self Exciting Piezoelectric Sensor for Parallel AFM Applications


Published in:
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators, 1, 451-453
Year:
1997
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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