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conference paper
Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM Applications
1996
Eurosensors X - The 10th European Conference on Solid-State Transducers
Type
conference paper
Authors
Publication date
1996
Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Start page
481
End page
484
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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