Home > Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM Applications
 

Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM Applications

Indermühle, P.-F. ; Schürmann, G. ; Racine, G.-A. ; de Rooij, N. F.

Published in:
Eurosensors X - The 10th European Conference on Solid-State Transducers, 481-484
Year:
1996
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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