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  4. Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM Applications
 
conference paper

Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM Applications

Indermühle, P.-F.
•
Schürmann, G.
•
Racine, G.-A.
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1996
Eurosensors X - The 10th European Conference on Solid-State Transducers
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Type
conference paper
Author(s)
Indermühle, P.-F.
Schürmann, G.
Racine, G.-A.
de Rooij, N. F.  
Date Issued

1996

Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Start page

481

End page

484

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39428
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