conference paper
Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM Applications
1996
Eurosensors X - The 10th European Conference on Solid-State Transducers
Type
conference paper
Author(s)
Date Issued
1996
Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Start page
481
End page
484
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record