Infoscience

Conference paper

Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM Applications

Indermühle, P.-F.; Schürmann, G.; Racine, G.-A.; de Rooij, N. F.
  • Published in: Eurosensors X - The 10th European Conference on Solid-State Transducers, p. 481-484
  • Publication date: 1996

    Reference

    • SAMLAB-CONF-1996-014

    Record created on 2009-05-12, modified on 2016-08-08

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