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conference paper
Integration of a Large Tip with High Aspect Ratio on an xy-Microstage for AFM Imaging
1995
Transducers'95 the 8th Internat. Conf. on Solid-State Sensors and Actuators
Type
conference paper
Authors
Publication date
1995
Published in
Transducers'95 the 8th Internat. Conf. on Solid-State Sensors and Actuators
Start page
652
End page
655
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
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