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Integration of a Large Tip with High Aspect Ratio on an xy-Microstage for AFM Imaging

Indermühle, P.-F. ; de Rooij, N. F.

Published in:
Transducers'95 the 8th Internat. Conf. on Solid-State Sensors and Actuators, 652-655
Year:
1995
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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