Infoscience

Conference paper

Integration of a Large Tip with High Aspect Ratio on an xy-Microstage for AFM Imaging

Indermühle, P.-F.; de Rooij, N. F.
  • Published in: Transducers'95 the 8th Internat. Conf. on Solid-State Sensors and Actuators, p. 652-655
  • Publication date: 1995

    Reference

    • SAMLAB-CONF-1995-005

    Record created on 2009-05-12, modified on 2016-08-08

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